Professor Di Chen
Professor Di Chen received his diploma chemist and doctor of natural science from university of Hamburg, Germany in 1986 and 1990 respectively. From 1990 to 1992 he was post-doctoral researcher at Micro Parts Company, Germany. Since 1993 he was associate professor and professor at Shanghai Jiao Tong University. He is now vice director of Research Institute of Micro/nano Science and Technology, Shanghai Jiao Tong University. He has undertook many research projects in microfabrication technology and micro-electro-mechanical systems (MEMS) by Ministry of Science & Technology, Ministry of Education, National Natural Science Foundation of China, Education Commission of Shanghai Municipality, Science & Technology Commission of Shanghai Municipality, National State Key Laboratory, 3M and SIEMENS Company. He has published more than 150 papers and authorized 20 Chinese invention patents. The published papers were cited ca. 600 times. He has written parts of 4 books in the field of MEMS and microsensors, and translated the book “Introduction to Microfabrication”. He received the second prize of technology invention of China (2008), first prize of technology invention of Shanghai Municipality (2007) and second prize of natural science of Ministry of Education (2008). He is member of editorial board of several MEMS journals. His research fields are development and application of LIGA-like microfabrication technique, implantable microsystems, microfluidics and RF MEMS.
Typical papers
1.  X.M. Jing, D. Chen, D. Fang, C. Huang, J. Liu, X. Chen; “Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology”; Microelectronics Journal, 2007, 38: 120–124
2.  X.M. Jing, D. Chen, C. Huang, X. Chen, J.Q. Liu, J. Zhu; “Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology”; High technology letters 2007, 13(4): 369-372
3.  X.M. Jing, G. Engelmann, D. Chen, J. Wolf, O. Ehrmann, H. Reichl; “Profile of the wafer level ECD gold bumps under variable parameters”; Journal of Materials Science: Materials in Electronics, 2008, 19(6): 563-568
4.  C. Huang, D. Chen, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu , Z.Y. Wei, H.Q. Li; “A Compact Wide Band Filter Based on the Left Handed Material Theory”; Microelectronic Engineering, 2008, 85(10): 2183-2186
5.  C. Huang, D. Chen, X. Chen, J.Q. Liu, X.M. Jing, J. Zhu, W.J. Wei, Z.Y. Wei, H.Q. Li; “A metamaterial directional antenna fabricated using MEMS Technique”；Chinese Journal of Sensors and Actuators，2008, 21(3): 533-535
6.  X.M. Jing, D. Chen, C. Huang, X. Chen, J.Q. Liu, G. Engelmann; “Fine pitch ECD Gold Bumping towards future demands”；JOURNAL OF FUNCTIONAL MATERIALS AND DEVICES, 2008, 14(1): 158-162
7.  H.W. Sun, J.Q. Liu, P. Gu, D. Chen; “Anti-sticking treatment for a nanoimprint stamp”; Applied Surface Science; 2008, 254: 2955–2959
8.  J.Q. Liu, H.B. Fang, Z.Y. Xu, X.H. Mao, X.C. Shen, D. Chen, H. Liao and B.C. Cai; “A MEMS-based piezoelectric power generator array for vibration energy harvesting”;  Microelectronics Journal 2008, 39(5): 802-806
9.  G. Meng, W. M. Zhang, H. Huang, J. B. Zhou, D. Chen. Micro-rotor dynamics for micro-electro-mechanical systems (MEMS). Chaos, Solitons and Fractals, 2009, 40(2): 538-562.
10.  C. Huang, D. Chen, W.J. Wei, X.M. Jing, X. Chen, J.Q. Liu, J. Zhu, Z.Y. Wei, H.Q. Li；“Compact Band Reject Filter for Micro Electromechanical Systems”；OPTICS AND PRECISION ENGINEERING，2009, 17(6):1244-50
11.  C. Huang, D. Chen, S. Leidich, T. Gessner; “Compact Meta-material Transmission Line Balun Based on Meander Lines Structure and MEMS Technology”; Microelectronic Engineering, 2010, 87: 584–587
12.  X.M. Jing, D. Chen, C. Huang, X. Chen, J.M. Miao, J.Q. Liu and J. Zhu; “Elastic MEMS probe card based on PDMS"; Journal of Micromechanics and Microengineering, 2010, 20(5): 055038 (7pp)
13.  X.M. Jing, D. Chen, X. Chen, J. Miao, J.Q. Liu and J. Zhu; "Design and fabrication of a micromachined bi-layer cantilever probe card"; Journal of Micro-Nanolithography, MEMS, and MOEMS (JM3), 2010, 9(4): 043005
14.  H.W. Sun, G.G. Liu, S.M. Lin, J.Q. Liu, and D. Chen; “Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature”; J. Micro/Nanolith. MEMS MOEMS 2010, 9: 033005
15.  J.D. Chen, D. Chen, T. Yuan, X. Chen;”Microfluidic PCR Chips”; Nano Biomedicine and Engineering, 2011, 3(4): 203-210
16.  H. X. Du, Z.G. Wang, Z.L. Yang, D. Chen, J.D. Chen, R.J. Hu; “Separation of Circulating Cancer Cells by Unique Microfluidic Chip in Colorectal Cancer”; Oncology Research, 2011, 19(10-11): 487-500,
17.  J.D. Chen, D. Chen, T. Yuan, X. Chen; ”A multi-frequency sandwich type electromagnetic vibration energy harvester”; Applied Physics Letters, 2012, 100: 213509 , DOI: 10.1063/1.4722814 (SCI 85，Siemens)
18.  J. Zhu, Y. Cao, Y. Li, X. Chen, D. Chen; “Integrating process and novel sacrificial layer fabricating technique based on diluted SU-8 resist”; Microelectronic Engineering 2012, 93: 56–60 （SCI，EI 86，DOI: 10.1016/j.mee.2011.12.013
19.  W.M. Zhang, G. Meng, Z.K. Peng, D. Chen, “Coupled nonlinear effects of random surface roughness and rarefaction on slip flow in ultra-thin film gas bearing lubrication”;  Journal of Tribology, 2012, 134(2): 024502，
20.  Xiansong Wang, Da-Peng Yang, Peng Huang, Min Li, Chao Li, Di Chen and Daxiang Cui; “Hierarchically assembled Au microspheres and sea urchin-like architectures: formation mechanism and SERS study;  Nanoscale; 2012, 4, 7766-7772;
21.  Jingdong Chen, Di Chen, Yao Xie, Tao Yuan and Xiang Chen, “Progress of Micro­fluidics for Biology and Medicine”, Nano-Micro Lett. 2013, 5(1): 66-80.
22.  T. Yuan, D. Chen, J.D. Chen, X. Chen, X.W. Wang, B.L. Lu ; “A novel MEMS elastic-based dry electrode for electroencephalography measurement”;  Microsystem Technologies，2013, http://dx.doi.org/10.1007/s00542-013-1799-7
23.  Jingdong Chen, Di Chen, Tao Yuan, Yao Xie, and Xiang Chen; “A microfluidic chip for direct and rapid trapping of white blood cells from whole blood”; Biomicrofluidics, 2013, 7, 034106;
24.  Chenyi Hu, Da-PengYang, ZhihuaWang, Peng Huang, XiansongWang, Di Chen, Daxiang Cui, MoYang, Nengqin Jia; “Bio-mimetically synthesized Ag@BSA microspheres as a novel electrochemical biosensing interface for sensitive detection of tumor cells”; Biosensors and Bioelectronics 2013, 41: 656–662  (SCI 93
25.  J. Zhu, Y. Cao. H.Wang, Y.G. Li, X. Chen, D. Chen; ”Fabricating Process of Hollow out-of-plane Ni Microneedle Array and Property of the Integrated Microfluidic Device”; J. Micro/Nanolith. MEMS MOEMS, accepted
Contact
Micro - Nano Centre of Shanghai Jiaotong University 2-309
TEL: 3420 6992
e-mail： dchen@sjtu.edu.cn